Surface Analysis

Secondary Ion Mass Spectrometry (ToF-SIMS)

Time of flight Secondary ion mass spectrometry is a technique that provides elemental, chemical state, and molecular information from surfaces of solid materials. The detection limit in ToF-SIMS is in the ppm range which makes the technique very surface sensitive. Chemical characterisation can be conducted as point or area analysis, line scans and mappings. The ion gun also enables sputtering from which depth profiles can be obtained. See also our other techniques used for chemical characterisation.

 

Typical applications:

• Analysis of different deposits
• Chemical state determinations
• Trace element analysis

Physical electronics (PHI) Trift II.