Energy Dispersive X-ray Spectroscopy (EDX)
Energy dispersive X-ray analysis (EDX) is a microanalysis technique used in conjunction with Scanning Electron Microscopy (SEM). EDX offers elemental identification and quantitative compositional information of features down to ~1 µm in size. EDX can be performed as point or area analysis, line scans and mappings.
Typical applications:
- Chemical analysis of thicker deposits, coatings and oxides
- Corrosion evaluation
- Identification of metallic materials