Energy Dispersive X-ray Spectroscopy (EDX)

Energy Dispersive X-ray Spectroscopy (EDX) is an analysis technique used in conjunction with Scanning Electron Microscopy (SEM). EDX offers elemental identification and quantitative compositional information of features down to ~1 µm in size. EDX can be performed as point or area analysis, line scans and mapping, i.e. chemical maps showing the distribution of selected elements over the imaged surface section.

Typical applications:

• Chemical identification of alloys and phases
• Analysis of coatings, films or particles down to ~1 µm in size.
• Analysis of corrosion products