Auger Electron Spectroscopy (AES)
Auger electron spectroscopy is an analytical technique for elemental analysis of very thin films or small features. The information depth and lateral resolution for AES are in the order of nanometers. In combination with a sputtering ion gun, AES can also offer depth profiling. AES can be performed as point or area analysis, line scans and mappings.
Typical applications:
- Surface cleanliness of medical implants
- Chemical analysis of thin stains
- Depth characterizations of oxide films
- Chemical analysis of small features (<1 µm)
