Imaging

Scanning Electron Microscopy

Scanning electron microscopy (SEM) is a powerful technique for imaging features down to the nanometer range. SEM can provide topographical and compositional information and has a greater depth of field compared to conventional light optical microscopes.

Typical applications:

  • Imaging of small features
  • Spatial variations in chemical composition
  • Enables chemical analysis (EDX)
  • Fractography, an important part in failure investigations

 

Energy Dispersive X-ray Spectroscopy (EDX)

Energy dispersive X-ray analysis (EDX) is a microanalysis technique that can be used for chemical characterization of the sample being analysed in SEM. EDX offers elemental identification and quantitative compositional information of features down to ~1 µm in size. EDX can be performed as point or area analysis, line scans and mappings.

Typical applications:

  • Chemical analysis of thicker deposits, coatings and oxides
  • Corrosion evaluation
  • Identification of metallic materials
scanning electron microscopy, HITACHI SU5000 with SE and BSE detectors
HITACHI SU5000 with SE and BSE detectors
EDX detector
Bruker XFlash 5030